NANO2210 – Semiconductor Fabrication


Credits:	3 (2/1/0)
Description:	This second-year nanoscience course focuses on the terminology, concepts, processes, products and equipment commonly used in the manufacture of ultra-large-scale integrated (ULSI) semiconductors. This course meets for two hours of lecture and two hours of laboratory each week.
Prerequisites:	NANO1101 AND NANO1102
Corequisites:	(None)
Competencies:	Explain the underlying principles of semiconductor fabrication. Describe key terms used in the semiconductor industry. Summarize products used in the manufacturing of ULSI semiconductors. Discuss technologies used to fabricate and characterize ULSI semiconductors. Explain the process and applications of photolithography. Summarize thin film deposition and ion implantation techniques. Describe the equipment used to manufacture ULSI semiconductors. Competently operate equipment used to manufacture ULSI semiconductors. Troubleshoot experimental procedures and equipment.
MnTC goal areas:	(N/A)